| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum operation device wherein the electric wiring connecting between the air side and a vacuum chamber does not obstruct arm operation and operation of a robot is quickly controlled. SOLUTION: A robot 1 comprises arms 5, 6 and 7, an arm supporting body 8 which supports the arms 5, 6 and 7, and an arm driving shaft 9 which drives the arm 5 while receiving a driving force on the air side. At a housing opening part 21a, a magnetism seal unit 10 is assigned while rotation is allowed. The magnetism seal unit 10 seals the arm driving shaft 9 with a magnetic fluid 14 while rotation is allowed, and seals the periphery surface of the housing opening part 21a with a magnetic fluid 17. To an end surface 18, the arm supporting body 8 is fixed. Inside the magnetism seal unit 10, an electric wiring part 20 is provided, and the electric wiring part 20 comprises a plug which is formed by metallization-welding a terminal pin to a ceramics main body. |
