NEGATIVE RADIATION SENSITIVE RESIN COMPOSITION

摘要

PROBLEM TO BE SOLVED: To improve sensitivity and dimensional faithfulness as well as to prevent incomplete development, to ensure high resolution and to form a rectangular resist pattern by using an alkali-soluble resin contg. a specified copolymer. SOLUTION: This radiation sensitive resin compsn. contains an alkali-soluble resin contg. at least one of a hydroxystyrene-styrene copolymer having 70-95mol% hydroxystyrene unit content and a hydroxystyrene-α-methylstyrene copolymer, a radiation sensitive acid generating agent and a crosslinking agent. The pref. hydroxystyrene unit content is 75-95mol%, especially 80-95mol%. The radiation sensitive acid generating agent is preferably a halogen-contg. compd. The crosslinking agent is preferably methoxymethylated amino resin, especially preferably methoxymethylated urea resin.