发明名称 |
FABRICATION OF QUANTUM BOX, SEMICONDUCTOR LASER AND FABRICATION THEREOF |
摘要 |
PROBLEM TO BE SOLVED: To fabricate a quantum box exhibiting sufficient three-dimensional quantum effect stably. SOLUTION: A rectangular bore 4 having a side W of 20nm or less is made by etching an Al0.7 Ga0.3 As barrier layer 3 formed on an AlAs lower clad layer 2 using a 5:1 mixture liquid of aqueous solution of tartaric acid (50wt.% concentration) and hydrogen peroxide water (33wt.% concentration). An undoped Alx Ga1-x As (0<=x<=0.4) quantum box layer 5 is then buried in the rectangular bore 4 and an AlAs upper clad layer 6 is grown on the entire surface thus obtaining a quantum box layer 5 buried in each rectangular bore 4. |
申请公布号 |
JPH1012975(A) |
申请公布日期 |
1998.01.16 |
申请号 |
JP19960166213 |
申请日期 |
1996.06.26 |
申请人 |
MITSUBISHI ELECTRIC CORP |
发明人 |
NAGAI YUTAKA |
分类号 |
H01L29/06;H01L33/06;H01L33/14;H01L33/30;H01L33/44;H01S5/00 |
主分类号 |
H01L29/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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