| 摘要 |
PROBLEM TO BE SOLVED: To provide a determining method of a dimensional error which enables accurate determination of an order of coincidence and the dimensional error without differences among individuals and measurement of dimensions with high reliability. SOLUTION: In the case when a dimensional errorΔL is determined by dimensional error calculating equationsΔL=F (N, b/a), N=int (2L/λ) wherein an interference fringe fraction b/a, a result of measurement, and an order N of interference calculated from preliminarily measured values are made variables,ΔLij (a wavelength i=1, 2...n, an order (j) of interference = 1, 2...m) is calculated, a wavelength K to be made the criterion of determination of coincidence is selected, (m) sets of mean valuesμand standard deviation valuesσin total are determined from the results of retrieval in the number of (n) being most approximate toΔLKj (j=1, 2...m) in regard to theΔLij in (n) groups of each wavelength, and the mean valueμat the time when the standard deviation valueσis the minimum is made a dimensional error of an object of measurement.
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