发明名称 SUBSTRATE TRANSPORT APPARATUS
摘要 PROBLEM TO BE SOLVED: To easily cope with the modification of the width of a substrate to be transported by using a simple and economical structure. SOLUTION: This apparatus transports a substrate by rotatably driving a pair of rollers 30 along with the roller shafts 20, the outer peripheral surfaces of the rollers 30 being in contact with both ends of the substrate in the width direction thereof. A V-groove 25, which is a roller fixing part, etc., are provided in an attachment which is key 24A etc. An attachment, which is a key mounting groove 23 etc., is provided on the roller 20, and the key 24A etc., are removably mounted thereto, so that the modification of the position of the rollers 30 can be coped with only by the replacement of the above-mentioned attachment.
申请公布号 JPH1013091(A) 申请公布日期 1998.01.16
申请号 JP19960167225 申请日期 1996.06.27
申请人 DAINIPPON SCREEN MFG CO LTD 发明人 HIRATA MASAAKI;TANABE KAZUNARI;FUKUI KIZASHI
分类号 G02F1/13;B65G39/04;G02F1/1333;H01L21/68;H05K13/02 主分类号 G02F1/13
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