SEMICONDUCTOR MANUFACTURING APPARATUS

摘要

PROBLEM TO BE SOLVED: To convey wafer cassettes in a highly clean atmosphere at a low facilities cost by providing a cassette conveyer along a plurality of semiconductor manufacturing apparatuses in a series of housings. SOLUTION: A cassette conveyer 3 is disposed between wafer cassette transfer units 2a, 2b so as to pass by the inner front face of the semiconductor manufacturing apparatus 1. A cassette conveying zone is a space made by a series of the semiconductor manufacturing apparatuses 1. The conveyer 3 is disposed in the conveying zone with clean units disposed in the upper space to feed clean air flowing down therein and keep the conveying zone clean. A conveying rail is laid in the conveying zone to freely run cassette tables 7 on the rail. The table 7 is capable of carrying required number of wafer cassettes 8 between the transfer units 2a, 2b.