摘要 |
PROBLEM TO BE SOLVED: To achieve stabilization of characteristic to external environmental changes and a lower cost by properly selecting the way of supporting a support device and the quality of material. SOLUTION: A piezo-electric vibrator 7 is so arranged to be driven with a resonance frequency of 1 wavelength resonance and a soft and a bonding is made on a node line of the piezo-electric vibrator 7 by a soft and insulating ring-shaped silicone rubber 31. Then, a U-shaped groove 311 is formed on the outer circumference of the rubber to make a support device 30 easy to fix. The support device 30 is made up of a bar-shaped metal comprising a AlZn based or FeNi based vibrationproof alloy with a low mechanical quality coefficient Qm and manufactured in a deformed Ω-shaped form with the Ω-shaped lower end thereof vertically extended. The ring part of the deformed Ω-shaped support device 30 is fitted into the U-shaped groove of the ring-shaped silicone rubber 31 to support the vibrator 7 and an open end 301 of the deformed Ω-shaped support device 30 is mechanically fixed on a circuit board 9. Lead from the vibrator 7 is connected directly to the circuit substrate 9. |