| 摘要 |
PROBLEM TO BE SOLVED: To measure the output of a sensor in a state while a contilever is not deflected at all, by hitting an air flow to the cantilever, continuously changing the bend of the cantilever and detecting the amount of deflection of the cantilever. SOLUTION: When an acceleration is applied to a semiconductor acceleration sensor, a cantilever 1a is bent, whereby a stress is generated at a surface of the cantilever. A resistance value is changed subsequent to the stress because of a piezoelectric effect of a piezoelectric resistor 2 formed on the surface. A potential difference proportional to the acceleration is output to a Wheatstone bridge circuit. The output potential difference is detected by a voltage detector 8, whereby the acceleration is detected. A vent hole 3a is formed in an upper cap 3. An air flow is introduced from outside through the vent hole 3a to hit an upper face of the lever 1a. The amount of deflection of the lever 1a can be continuously changed by continuously changing a flow velocity of the air flow. |
