PRODUCTION OF CONTACT PROBE,申请号JP19960167268-传众专利搜索

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发明名称	PRODUCTION OF CONTACT PROBE
摘要
申请公布号	JPH1010155(A)	申请公布日期	1998.01.16
申请号	JP19960167268	申请日期	1996.06.27
申请人	MITSUBISHI MATERIALS CORP	发明人	KATO NAOKI;ISHII TOSHINORI;NAKAMURA TADASHI;MATSUDA ATSUSHI;UEKI MITSUYOSHI;YOSHIDA HIDEAKI
分类号	G01R1/073;H01L21/66;H01R43/16;(IPC1-7):G01R1/073	主分类号	G01R1/073
代理机构		代理人
主权项
地址

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