发明名称 BEAM CONTROLLER AND ALIGNER EMPLOYING THE SAME
摘要 PROBLEM TO BE SOLVED: To sustain the performance of laser beam (beam quality) in good conditions constantly. SOLUTION: Detecting means 13, 14 detect the performance of a laser beam emitted from a laser light source 1. Based on the detection results, an arithmetic means 28 calculates the error of a detected performance with respect to the normal performance of laser beam. Based on the calculated error correcting means 29, 30-36 correct the performance of laser beam.
申请公布号 JPH1012957(A) 申请公布日期 1998.01.16
申请号 JP19960184009 申请日期 1996.06.25
申请人 NIKON CORP 发明人 NAKAJIMA TOSHIJI
分类号 G03F7/20;H01L21/027;H01S3/10;H01S3/134;H01S3/225;(IPC1-7):H01S3/134 主分类号 G03F7/20
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