摘要 |
PROBLEM TO BE SOLVED: To sustain the performance of laser beam (beam quality) in good conditions constantly. SOLUTION: Detecting means 13, 14 detect the performance of a laser beam emitted from a laser light source 1. Based on the detection results, an arithmetic means 28 calculates the error of a detected performance with respect to the normal performance of laser beam. Based on the calculated error correcting means 29, 30-36 correct the performance of laser beam. |