| 摘要 |
PROBLEM TO BE SOLVED: To provide a transportation device which is used for transporting such material as is easily destructed or damaged by static electricity spark. SOLUTION: An object holding means 1 which is almost channel-shaped when viewed from above is, through an insulation body 2, attached to a transportation means 3 which drives the object holding means 1, an object attracting member 4 is provided in the object holding means 1, and an object 5 is attracted/held with the object attracting member 4, and the object holding means 1 is driven by the transportation means 3, so that the object 5 is transported to a specified position. Relating to the object holding means 1, at least a part of it is constructed of a conductor, and a charging means 7 which changes electric potential of the object holding means 1 by charging or discharging it is connected. To the charging means 7, a charged value detecting means 11 which measures a charged value of the object 5 may be connected. |
