| 摘要 |
PROBLEM TO BE SOLVED: To efficiently supply a required proper amount of purified water by setting a direct acting, self controlled reducing valve with a built-in diaphragm, a direct acting solenoid valve and a specific fixed resistance pipe at predetermined points. SOLUTION: In order to distribute a proper amount of purified water to distribution nozzles 61, 62 of a reaction vesselcleaning mechanism 60 by one electric pump 120, a direct acting, self controlled reducing valve 130 having a diaphragm incorporated therein is arranged between the pump 120 and a branch pipe 140. Direct acting solenoid valves 161-165 and fixed resistance pipes 171-175 are set at respective ends of the branched pipings. Since a pressure change of the valve 130 at the secondary side is small, an extreme pressure drop is never brought about at the pipe 140 even if the amount of used water is maximum. Since the pipes 171-175 of a specific flow rate resistance, a specific diameter and a specific length are connected at the ends branched from the pipe 140 which is maintained nearly at a constant pressure, a proper jet amount per unit time can be obtained at each part. Moreover, owing to the presence of the solenoid valves 161-165, the water can be injected, stopped promptly. |
