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发明名称
VORRICHTUNG UND VERFAHREN ZUR STEUERUNG DER VERDAMPFTEN PARTIKELMENGE IN EINEM VERDAMPFUNGSPROZESS
摘要
申请公布号
AT162009(T)
申请公布日期
1998.01.15
申请号
AT19900111823T
申请日期
1990.06.22
申请人
BALZERS AKTIENGESELLSCHAFT
发明人
WEGMANN, URS;KOLLER, ALBERT
分类号
C23C14/54;H01J37/302;H01J37/305;(IPC1-7):H01J37/305
主分类号
C23C14/54
代理机构
代理人
主权项
地址
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