Verfahren und Einrichtung zur Bearbeitung eines Gegenstands in einer Umgebung unter vermindertem Druck,申请号DE19946005499T-传众专利搜索

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发明名称	Verfahren und Einrichtung zur Bearbeitung eines Gegenstands in einer Umgebung unter vermindertem Druck
摘要
申请公布号	DE69405499(T2)	申请公布日期	1998.01.15
申请号	DE19946005499T	申请日期	1994.06.09
申请人	HITACHI, LTD., TOKIO/TOKYO, JP	发明人	ITO, YOUICHI, KUDAMATSU-SHI, YAMAGUCHI 744, JP;EDAMURA, MANABU, NIIHARI-GUN, IBARAKI 315, JP;TAMURA, NAOYUKI, KUDAMATSU-SHI, YAMAGUCHI 744, JP;SHICHIDA, HIROYUKI, KUDAMATSU-SHI, YAMAGUCHI 744, JP
分类号	H01L21/302;H01L21/3065;H01L21/683;(IPC1-7):H01L21/00	主分类号	H01L21/302
代理机构		代理人
主权项
地址

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