OPTICAL SCANNING DEVICE, AND APPARATUS PROVIDED WITH SUCH A DEVICE

摘要

An optical scanning device is described, which is provided with a scanning element having a reflecting measuring reference face (31), and a position detection system (80) which supplies, inter alia, a measuring signal (Sz) for the position of the scanning element in a direction perpendicular to the reference face. By implementing the scanning element in a very thin form and by correcting said measuring signal (S) by means of the polygon bending signal (Sb) supplied by the position detection system, a very rapid and accurate scanning can be realized.