| 摘要 |
<p>A position detection system (80) is described for detecting movements of an object (20) in at least five degrees of freedom, which system comprises a radiation source (33), a beam splitter (36) for forming a first measuring sub-beam (45) and a second measuring sub-beam (50), a reflector (38) arranged in the path of one of these measuring beams (45, 50) and a composite radiation-sensitive detection system (60). The first measuring sub-beam (45) is used for detecting displacements along three mutually perpendicular axes (X, Y, Z), and the second measuring sub-beam (50) is used for detecting rotations about at least two of these axes.</p> |
