发明名称 DIELECTRIC CROSSLINKABLE COPOLYESTER WHICH ENABLES FORMATION OF PHOTOGRAPHIC IMAGE
摘要 PROBLEM TO BE SOLVED: To obtain a photosensitive film forming polymer which can be used as a base body for a laminated body of plural chip modules, etc., by using one kind of oligomer having a carboxylic acid end group and one kind of oligomer having an acyloxy end group. SOLUTION: Two kinds of oligomers are used to produce a photosensitive dielectric and insulating crosslinkable copolyester which can be used as a dielectric material for microelectronic circuits and as a photoresist film. The one oligomer has a carboxylic acid end group and the other has an acyloxy, preferably an acetoxy end group. The mixture of these oligomers is crosslinkable, in which at least one kind of the oligomers is a branched-chain oligomer and at least one kind of the two oligomers has a sensitive group for photographic planographic printing, preferably as the end group in the oligomer structure. It is preferable that the sensitive group for photosensitive planographic printing is present in the oligomer which contains a carboxylic acid end group.
申请公布号 JPH1010720(A) 申请公布日期 1998.01.16
申请号 JP19970062354 申请日期 1997.02.28
申请人 UNIV ILLINOIS 发明人 ECONOMY JAMES;SCHNEGGENBURGER LIZABETH A;SHI FANG
分类号 C08G63/191;C08G63/21;C08L67/07;G03F7/027;H01L21/027;H01L21/312;H01L21/768;H01L23/498;H01L23/522;H01L23/532;(IPC1-7):G03F7/027 主分类号 C08G63/191
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