SOLID STATE PULSE GENERATING APPARATUS

摘要

A relatively wide d.c. pulse generating system providing rise times normally attainable only with much narrower pulse width generation, comprising a plurality of sequentially operated groups of d.c. pulse generating modules achieving the combination of zero current SCR - switching and rapid magnetic switching and providing very high reliability and efficiency, and with the feature of continuously variable pulse width control and overall amplitude contouring, as for controlling applications such as plasma ion implantation where non-uniform contours of ion depth penetration normally would otherwise be obtained.