| 摘要 |
PROBLEM TO BE SOLVED: To realize a dry type pressure detector capable of measuring even the pressure of a high vacuum region (vacuum region of 1×10<-5> Torr or less) in spite of simple constitution. SOLUTION: A fixed stand 2 and a sensor chip 11 are bonded so that the arranging surface of the resistor elements of the sensor chip is opposed to one surface of the fixed stand 2 and a groove 22 for comparing the pressure of a fluid to be measured with reference pressure is formed between the fixed stand 2 and the sensor chip 11. A first electrode 116 is formed on a diaphragm 110 and a second electrode 117 is formed in opposed relation to the electrode 116 and connected to the conductor 34 and conductive pin 41 of the fixed stand 2. A membrane 121 of Au is formed on the contact surface with the fluid to be measured of the sensor chip 11. The fluid to be measured comes into contact with the groove part 120 of the sensor chip 11 and its pressure transmitted and the pressure with reference pressure acts on the diaphragm 110 to be converted into an electric signal. The arranging surface of the resistor elements of the sensor chip 11 does not come into contact with the fluid to be measured and a seal soln. required heretofore becomes unnecessary perfectly.
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