| 摘要 |
PROBLEM TO BE SOLVED: To improve the transportation efficiency of works by providing a drying section with plural spin drying mechanisms for drying the works by rotating the works at a high speed in individual drying positions and constituting these spin drying mechanisms so as to move back and forth sequentially between the drying positions and transfer positions. SOLUTION: The disk-shaped works W supplied by a loading section 4 are washed in a washing section 2 and are dried in the drying section 3; thereafter, the works are taken out by an unloading section 5. The works W are transferred between the respective sections by a transfer mechanism 6. At this time, the drying section 3 is constituted by providing the section with the spin drying mechanisms 45A to 45C for draining and drying the works W by rotating the works at the high sped. The spin drying mechanisms 45A, 45B among these mechanisms are so constituted as to oscillate back and forth discretely between the dry positions and the work transfer positions 3A set 10 the upper part at the center of the drying section 3. The third spin drying mechanism 45C is so constituted as to move back and forth linearly in a vertical direction between the drying position and the work transfer positions 3A.
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