| 摘要 |
<p>PROBLEM TO BE SOLVED: To produce a carrier for processing and treating semi-conductor wafers, excellent in stiffness, dimensional stability, antistatic properties and abrasion resistance, and a polyether-ketone resin composition which can give the carrier. SOLUTION: This composition is prepared by formulating 5-100 pts.wt. of carbon fibers which are characterized by their average fiber diameter of 5-20μm and average fiber length of 30-500μm to 100 pts.wt. of a polyether-ketone resin, and has a surface specific resistance of 10<8> -10<12>Ω. In addition, the resin composition is used to mold a carrier for processing and treating semiconductor wafers.</p> |
