| 摘要 |
PROBLEM TO BE SOLVED: To provide such a carrying device as being capable of changing the direction of a work with directionality and shortening a carrying time. SOLUTION: On a carrying device H, a carrying arm 4 rotationally, vertically and horizontally moved to a machine frame 1 to hold and carry a glass substrate G and a work support table 6 rotatable on the machine frame 1 are arranged. The carrying arm 4 and the work support table 6 are independently rotated and driven. The work support table 6 has a centering device provided with plural guide members to perform automatic centering when the glass substrate G is arranged on the centering device. The glass substrate G is taken out of the first cassette and temporarily stored in the centering device 11 and then the carrying device H is moved from the first position to the second position. During movement, the carrying arm 4 and the work support table 6 are separately rotated to change the direction of the glass substrate G. The glass substrate G is stored in the next processing system. |
