Direct current electrode sputtering equipment for optical disc manufacture

摘要

The equipment operates using a mask (12,13) which is fixed over the substrate (11) forming the base of the optical disc and to a plate (6). The mask is made of an electrically insulating material, preferably a ceramic or high polymer material or is covered with one of these materials. The plate (6) that supports the substrate carries a support (15) that attaches to the plate and a disc base (14) mounts the substrate on the plate. The plate and the disc base are also electrically insulated.