METHOD AND APPARATUS FOR THE EVALUATION OF A DEPTH PROFILE OF THERMO-MECHANICAL PROPERTIES OF LAYERED AND GRADED MATERIALS AND COATINGS

摘要

A technique for determining properties such as Young's modulus, coefficient of thermal expansion, and residual stress of individual layers within a multi-layered sample is presented. The technique involves preparation of a series of samples, each including one additional layer relative to the preceding sample. By comparison of each sample to a preceding sample, properties of the topmost layer can be determined, and residual stress at any depth in each sample, resulting from deposition of the top layer, can be determined.