Semiconductor substrate with temperature stabilised electronic circuit

摘要

An electronic circuit (2) is mounted on the semiconductor substrate (1), together with a heating element (3) containing a transistor (31) and a temperature sensor (4). The transistor is provided with appropriate control parameters by the electronic circuit and the temperature sensor, to stabilise the temperature of the substrate in the region of the electronic circuit. The transistor is designed and rated so that undesirable temperature fluctuations in the substrate, due to local expansion of the saturation range caused by control conditions which affect the transistor temperature, are reduced