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发明名称
PLASMA CHAMBER
摘要
申请公布号
EP0815283(A1)
申请公布日期
1998.01.07
申请号
EP19960905651
申请日期
1996.03.13
申请人
EMPA EIDGENOESSISCHE MATERIALPRUEFUNGS- UND FORSCHUNGSANSTALT
发明人
MOSER, EVA MARIA;MUELLER, CLAUS
分类号
B05D7/24;C23C14/22;C23C14/50;C23C16/458;C23C16/50;(IPC1-7):C23C16/50;C23C16/44
主分类号
B05D7/24
代理机构
代理人
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