Exhaust gas cleaning installation

摘要

PCT No. PCT/EP94/01985 Sec. 371 Date Dec. 18, 1995 Sec. 102(e) Date Dec. 18, 1995 PCT Filed Jun. 17, 1994 PCT Pub. No. WO95/00805 PCT Pub. Date Jan. 5, 1995Waste gas, in particular from plants for the chemical vapor-phase deposition and for the separation and etching by plasma processes, is purified from toxic agents by a method in which partial processes of the purification, such as thermal decomposition and oxidation, sorption of solid and gaseous reaction products, hydrolysis and cooling, are combined to act in a single reaction chamber. The reaction products of the waste gas burnt in a flame are led, directly in the combustion chamber, through a space filled with a finely dispersed liquid. This liquid forms a liquid film on all parts and inside walls of the reaction chamber. In a combustion chamber with a burner, the mentioned liquid distribution is obtained by a spraying device. Effective purification from toxic agents, and little corrosion of the components of the reaction chamber are achieved, any growth of solid reaction products in the combustion chamber being avoided. The generation of secondary toxic agents during the combustion of the waste gas is avoided.