发明名称 |
A.c. plasma processing system |
摘要 |
An AC plasma processing system according to the present invention may include a transformer for placing an alternating current on a first electrode and a second electrode contained within a process chamber. The secondary winding of the transformer is connected across the first and second electrodes. The primary winding of the transformer is connected to an external power supply. A switching device connected to the primary winding of the transformer periodically short circuits the primary winding to induce a secondary voltage in the secondary winding that is less than the arcing voltage associated with the process chamber. |
申请公布号 |
AU3390897(A) |
申请公布日期 |
1998.01.07 |
申请号 |
AU19970033908 |
申请日期 |
1997.06.12 |
申请人 |
SIERRA APPLIED SCIENCES, INC. |
发明人 |
BARRY W. MANLEY;KEITH H. BILLINGS |
分类号 |
H01J37/32 |
主分类号 |
H01J37/32 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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