发明名称 |
Process for making substratus for electronic, electro-optic and optical devices |
摘要 |
<p>According to the invention, in a process for making structural parts for electronic, electrooptic and optical components consisting of a substrate and a crystalline film deposited thereon, a crystalline substrate is used which has a buried amorphous layer and a monocrystalline layer produced thereon, and said monocrystalline layer is converted into a mixed crystal or a chemical compound. The latter should either correspond to the desired crystalline film or always approach the desired crystalline film in its lattice structure more closely than the original crystalline layer. <IMAGE></p> |
申请公布号 |
EP0475378(B1) |
申请公布日期 |
1998.01.07 |
申请号 |
EP19910115340 |
申请日期 |
1991.09.11 |
申请人 |
FORSCHUNGSZENTRUM JUELICH GMBH |
发明人 |
MANTL, SIEGFRIED, DR.;HOLLAENDER, BERND, DR.;BUTZ, RAINER, DR. |
分类号 |
C30B33/00;H01L21/20;H01L21/762;(IPC1-7):H01L21/20;H01L21/76 |
主分类号 |
C30B33/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|