发明名称 Process for making substratus for electronic, electro-optic and optical devices
摘要 <p>According to the invention, in a process for making structural parts for electronic, electrooptic and optical components consisting of a substrate and a crystalline film deposited thereon, a crystalline substrate is used which has a buried amorphous layer and a monocrystalline layer produced thereon, and said monocrystalline layer is converted into a mixed crystal or a chemical compound. The latter should either correspond to the desired crystalline film or always approach the desired crystalline film in its lattice structure more closely than the original crystalline layer. <IMAGE></p>
申请公布号 EP0475378(B1) 申请公布日期 1998.01.07
申请号 EP19910115340 申请日期 1991.09.11
申请人 FORSCHUNGSZENTRUM JUELICH GMBH 发明人 MANTL, SIEGFRIED, DR.;HOLLAENDER, BERND, DR.;BUTZ, RAINER, DR.
分类号 C30B33/00;H01L21/20;H01L21/762;(IPC1-7):H01L21/20;H01L21/76 主分类号 C30B33/00
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