| 摘要 |
PROBLEM TO BE SOLVED: To form a CdTe film of good quality on a CdS film without eroding it by a method wherein a cadmium chloride solution is applied to the CdTe film on the CdS thin film which is formed by the thermal decomposition of an organic phosphorus/cadmium complex, and a heat treatment is conducted in an inert gas atmosphere containing a specific concentration of oxygen. SOLUTION: A CdS film 2 is formed on a glass substrate 1 by thermally decomposing an organic sulfur-cadmium complex. CdTe powder is provided on the opposing surface of the CdS film 2 as a CdTe source, and after decompressing to 1 to 10Torr, the CdTe is evaporated by heating as the vapor of Cd and Te, and a CdTe film 3 is formed on the CdS film 2. After a cadmium- chloride solution has been applied by a spinner to the CdTe film 3 formed as above-mentioned, heat treatment is conducted in an inert gas atmosphere of oxygen molality of 1,000 to 100,000ppm, and crystal particle size is increased. Then, a carbon film 4 and a silver electrode 5 are formed, and a solar battery element is manufactured. |
