GAS SUPPLYING METHOD AND SUPPLYING DEVICE OF APPARATUS FOR PRODUCING SEMICONDUCTOR,申请号JP19960170547-传众专利搜索

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发明名称	GAS SUPPLYING METHOD AND SUPPLYING DEVICE OF APPARATUS FOR PRODUCING SEMICONDUCTOR
摘要
申请公布号	JPH101776(A)	申请公布日期	1998.01.06
申请号	JP19960170547	申请日期	1996.06.10
申请人	CANON INC	发明人	HITSUISHI MITSUHARU
分类号	G03G5/08;C23C16/44;C23C16/455;C23C16/50;H01L21/205;(IPC1-7):C23C16/50	主分类号	G03G5/08
代理机构		代理人
主权项
地址

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