发明名称 Semiconductor light-emitting device and production method thereof, and crystal-growing method suitable for the production method
摘要 According to one aspect of the invention, a crystal-growing method for forming a II-VI single crystalline semiconductor expressed by Zn1-xCdxSe (where 0<x<0.35) is provided. The crystal-growing method includes a step of epitaxially growing the II-VI single crystalline semiconductor on a substrate by: supplying a II element Zn onto the substrate by using a molecular beam from a ZnSe compound source and a molecular beam from a Zn elemental source; supplying a II element Cd onto the substrate by using a molecular beam from a CdSe compound source; and supplying a VI element Se onto the substrate by using a molecular beam from a ZnSe compound source.
申请公布号 US5705831(A) 申请公布日期 1998.01.06
申请号 US19950415540 申请日期 1995.04.03
申请人 MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. 发明人 UEMURA, NOBUYUKI;KUBO, MINORU;SASAI, YOICHI;OHKAWA, KAZUHIRO;KAMIYAMA, SATOSHI;UENOYAMA, TAKESHI
分类号 H01L33/00;H01L33/06;H01L33/28;(IPC1-7):H01L29/22;H01L31/025;H01L31/029 主分类号 H01L33/00
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