发明名称 |
Semiconductor light-emitting device and production method thereof, and crystal-growing method suitable for the production method |
摘要 |
According to one aspect of the invention, a crystal-growing method for forming a II-VI single crystalline semiconductor expressed by Zn1-xCdxSe (where 0<x<0.35) is provided. The crystal-growing method includes a step of epitaxially growing the II-VI single crystalline semiconductor on a substrate by: supplying a II element Zn onto the substrate by using a molecular beam from a ZnSe compound source and a molecular beam from a Zn elemental source; supplying a II element Cd onto the substrate by using a molecular beam from a CdSe compound source; and supplying a VI element Se onto the substrate by using a molecular beam from a ZnSe compound source.
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申请公布号 |
US5705831(A) |
申请公布日期 |
1998.01.06 |
申请号 |
US19950415540 |
申请日期 |
1995.04.03 |
申请人 |
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. |
发明人 |
UEMURA, NOBUYUKI;KUBO, MINORU;SASAI, YOICHI;OHKAWA, KAZUHIRO;KAMIYAMA, SATOSHI;UENOYAMA, TAKESHI |
分类号 |
H01L33/00;H01L33/06;H01L33/28;(IPC1-7):H01L29/22;H01L31/025;H01L31/029 |
主分类号 |
H01L33/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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