发明名称 ADSORBED SPECIES DETECTING DEVICE AND SOLID EVALUATING SYSTEM
摘要 <p>PROBLEM TO BE SOLVED: To prevent the breakage of an infrared transmitting window part by radiation heat even when the radiation heat from a sealed chamber acts on it by cooling the window part forming a part of the wall of the sealed chamber provided in a reaction apparatus by a cooling means. SOLUTION: A reaction apparatus 30 has a cylindrical casing 31, the support part 37a of a hollowed annular support body 37 is fastened onto an annular flange part 31a provided on the upper end thereof through an O-ring Q by a plurality of screws P. A cooling body 38 formed of a cooling member 38a consisting of an annular aluminum-made heat sink and an annular fixed member 38b is provided within the support body 37, and fixed to an annular bulkhead 37b. An infrared transmitting window part 39 is airtightly fixed to the inner circumferential wall of the fixed member 38b by an O-ring, and a sealed chamber to a solid body 36 is formed by the casing 31, the O-ring Q, the support body 37, and the window part 39. According to this structure, since the window part 39 is cooled by the cooling body 38, the influence of heat from a heating furnace 32 is suppressed, the window part 39 is never thermally broken, and the solid body 36 can be precisely evaluated.</p>
申请公布号 JPH102858(A) 申请公布日期 1998.01.06
申请号 JP19960154525 申请日期 1996.06.14
申请人 NIPPON SOKEN INC;HORIBA LTD 发明人 OGATA IPPEI;SUMIYA ATSUHIRO;SATAKE TSUKASA
分类号 G01N31/00;G01N21/00;G01N21/35;G01N21/62;G01N21/71;G01N21/75;(IPC1-7):G01N21/62 主分类号 G01N31/00
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