| 摘要 |
PROBLEM TO BE SOLVED: To uniformly polish a plural number of workpieces by simultaneously applying uniform pressure on all of the workpieces by using a plural number of holding bodies of the workpieces. SOLUTION: Each of a plural number of holding bodies 6 of workpieces has an elastic thin film 13 forming a pressure fluid chamber 14 respectively by receiving pressure fluid of water, air, etc., and a workpiece W is held on the side of a lower surface of the elastic thin film 13. Each of the pressure fluid chambers 14 is communicated to each other through a solid chamber 16 having larger capacity than the pressure fluid chamber. It is possible to flatten each of the workpieces W as equalization of surfaces to be polished of the workpieces W is automatically carried out, equally distributed pressure is applied, the same pressure is simultaneously applied on all of the workpieces W and the surfaces to be polished of a plural number of the workpieces W are polished with uniform working pressure. |
