| 摘要 |
A testing equipment having a refrigerator incorporated therein which is capable of accomplishing a test for electrical characteristics of a tested object under stable circumstances substantially free from any vibration. A refrigerator and a counter balance put on a floor are connected together through a rigid structure of increased strength, to thereby minimize vibration of the refrigerator. Vibration-proof pads are arranged between the counter balance and the floor. Also, Rubber dampers are arranged between a frame and an upper wall plate. Further, vibration-proof pads are arranged between the frame and the floor. Such arrangement of the pads and dampers substantially prevents transmission of vibration of the refrigerator to both a prober actuation unit and a tested object holder.
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