发明名称 |
Infrared ellipsometer/polarimeter system, method of calibration, and use thereof |
摘要 |
A sample system investigation system, such as an ellipsometer or polarimeter system, for use in investigating sample systems with electromagnetic wavelengths in the infrared range, and a calibration method for compensating nonidealities in multi-dimensional system rotated and non-rotated component representing matricies, are disclosed. An essentially achromatic compensator of dual-rhomb construction, which introduces a (3*LAMBDA/4) phase shift, but essentially no deviation in the direction of propagation of a polarized beam of electromagnetic wavelengths caused to pass therethrough, even when said compensator is caused to continuously rotate, is also disclosed.
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申请公布号 |
US5706212(A) |
申请公布日期 |
1998.01.06 |
申请号 |
US19960618820 |
申请日期 |
1996.03.20 |
申请人 |
BOARD OF REGENTS OF UNIVERSITY OF NEBRASKA;J.A. WOOLLAM CO. INC. |
发明人 |
THOMPSON, DANIEL W.;JOHS, BLAINE D. |
分类号 |
G01J3/28;G01J4/00;G01N21/21;(IPC1-7):G01N21/21;G01J3/447 |
主分类号 |
G01J3/28 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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