发明名称 Method of checking design rules for semiconductor integrated circuit
摘要 Design rule check errors are outputted to a working file based on data entered from a mask pattern data storage unit and data entered from a design standard file, and a false error is removed from the design rule check errors based on data entered from the mask pattern data storage unit and data entered from the working file, and outputted as a design rule check result. The false error which is removed from the design rule check errors is determined based on whether the design fuel check errors overlap the mask pattern data stored in the mask pattern data storage unit.
申请公布号 US5706295(A) 申请公布日期 1998.01.06
申请号 US19960686815 申请日期 1996.07.26
申请人 NEC CORPORATION 发明人 SUZUKI, KYO
分类号 H01L21/82;G06F17/50;(IPC1-7):G06F11/00 主分类号 H01L21/82
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