PRODUCTION OF HYBRID OPTICAL INTEGRATED CIRCUIT

摘要

PROBLEM TO BE SOLVED: To efficiently fabricate a three-dimensional waveguide in a short time and to obtain a desired sectional form at the time of forming the three- dimensional waveguide from a multilayered film for optical waveguide formed on a substrate. SOLUTION: After the multilayered film 4 for the optical waveguide is formed on the substrate 1, a neighboring region of a part to be the three-dimensional waveguide in the multilayered film 4 for the optical waveguide is removed by machining while leaving a thin residual film 2a. The machining is executed by a process for forming grooves 7 along the lines corresponding to both flanks and an end face of the three-dimensional waveguide and a process for surface- grinding outside regions of the grooves 7. Then, the residual film 2a is removed by wetetching.