| 摘要 |
PROBLEM TO BE SOLVED: To obtain cleaning water with high purity suitable for cleaning electronic apparatus by specifying the materials of an ion exchange membrane, an anode chamber frame, an anode catalyst and a cahotde catalyst. SOLUTION: The main body 1 of an electrolytic cell is composed of an anode chamber gasket 3 and a cathode chamber gasket 4 sandwiching a perfluorocarbon cation exchange membrane 2, an anode chamber wall board 5 and a cathode chamber wall board 6 in which the parts in contact with an electrolyte are made of fluorine resin. The anode face in the cation exchange membrane 2 is provided with a porous anode 7 composed of the powder of platinum group metals or the oxides thereof, and the cathode face is provided with a porous sheet shaped cathode 8 composed of platinum or carbon. An anolyte such as a hydrochloric acid soln. infiltrates into the anode chamber, is brought into contact with the anode 7, is oxidized by a compound having a high oxidation-reduction potential such as hypochlorous acid and is discharged from an anolyte outlet as pickling water. Since the substance small in elution is used as electrode substance, the amt. of impurities intruded into the obtd. washing water can be regulated to zero or a trace. |
