| 摘要 |
<p>PROBLEM TO BE SOLVED: To position a support device highly accurately by providing attraction members which approximately cancel vertical positive rigidity of a guide member having positive rigidity and a drive means which drives a plate having a prescribed free degree in the vertical direction in a stage. SOLUTION: A support device is provided with a stage 10 mounted horizontally, flat springs 20a-20c which are fitted to the stage 10 and have rigidity in the horizontal direction and positive rigidity in the vertical direction, a table which is fitted thereto and has N (an integer 2 or more) free degree in relation to the stage 10, permanent magnets 14, 15 which have negative rigidity for approximately canceling the positive rigidity in the vertical direction of the flat springs 20a-20c, and an electromagnetic drive system for driving the table vertically to the stage 10. The application point of the electromagnetic drive system, the application points of the flat springs 20a-20c, and the application points of the permanent magnets 14, 15 to the table 30 are approximately coincided with one another at least in relation to the vertical direction.</p> |
