| 摘要 |
<p>PROBLEM TO BE SOLVED: To eliminate the generation of bleeding of liquid drops, and suppress the irregularity in the diameter of liquid drops to improve the uniformity and reproducibility by maintaining the atmosphere on a substrate, especially humidity, in the predetermined range, and dripping liquid drops in this condition. SOLUTION: At the time of dripping the liquid onto a substrate 1, a humidity meter 10 is provided near the board 1 so as to measure the humidity on the substrate, and a constant temperature and humidity air device 14 is used so as to maintain the humidity on the substrate, which is placed on a stage 13, at 40-70%. Under the stage 13, an X-directional linear bearing 11 and a Y-directional linear bearing 12 can be prevented. With this device, humidity on the substrate is maintained at 70% or less so as to eliminate the generation of stair of the liquid drop, and a dot formed into the stabilized shape at the stabilized diameter can be formed, and the deposition of crystal by the evaporation of the solvent can be restricted, and as a result, an electron source having the stabilized electron emission characteristic, a display panel and an image forming device can be obtained. As a liquid dripping device 9, any device, which can form a desirable liquid drop, can be used, but especially, an ink-jet type device is desirable.</p> |
