摘要 |
<p>PROBLEM TO BE SOLVED: To provide an electron emission element as an electron beam source capable of realizing a high-quality image forming device. SOLUTION: A gap 5 is formed in a conductive film 4 formed by laminating layers 4a and 4b made of different materials, carbon and/or a carbon compound is deposited in at least one part of the gap 5 and its neighborhood, and an electron emission part 6 is formed. Thus, the position and shape of the electron emission part 6 can be controlled precisely, uniformity of element characteristics is realized, and an element with high electron emission efficiency and durability is obtained.</p> |