APPARATUS FOR CARRYING WAFER IN AND OUT

摘要

PROBLEM TO BE SOLVED: To provide an apparatus for carrying wafers in and out with which a transferring arm does not stop when a wafer transferred to a treatment unit and which does not need detection of presence of the wafer each time a wafer is transferred. SOLUTION: A cassette C housed in a case 1 is taken out from the case 1 by rotating a ball screw 2. In this operation, the cassette C comes down since a placing table 6 comes down. During the downturn of the cassette C, the position in which a wafer W is housed is recognized by sensors 3 and 4. The placing table 6 comes down to the lowest position and stops. A controller 15 drives a transferring arm 12 to transfer the water W to a processing part 30. The placing table 6 does not come up until all processing operations of the wafer W in the cassette C are finished and the wafer W is housed again. During the processing, transferring of the wafer can be performed correctly since the housing position of the cassette C is updated when needed.