发明名称 |
Apparatus for inspecting surface defects with regularly reflected light and peripherally scattered light |
摘要 |
Virtually all of the light reflected from an object to be inspected is made incident upon a focusing lens 7, a quantity of light in a regularly reflected light region on an plane P1 where an image is formed by a lens 7 is detected by a photodiode 8, while a quantity of light in a peripherally scattered light region is detected by a photodiode 9. If the quantity of light received (VDET1) in the regularly reflected light region is lower than a first reference value (VREF1) (S1=1), and the quantity of light received (VDET2) in the peripheral scattered light region is higher than a second reference value (VREF2) (S2=1), a determination is made that a defect is present.
|
申请公布号 |
US5706081(A) |
申请公布日期 |
1998.01.06 |
申请号 |
US19970852702 |
申请日期 |
1997.05.07 |
申请人 |
NSK LTD. |
发明人 |
FUKASAWA, TOSHIO;EISHIMA, MASAMI;NAGAI, SHINICHIRO;ONO, JUNICHI |
分类号 |
G01B11/30;G01N21/88;G01N21/93;(IPC1-7):G01N21/00;G01N21/84 |
主分类号 |
G01B11/30 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|