发明名称 DETECTING APPARATUS AND METHOD FOR PARTICLE IN CAVITY
摘要 PROBLEM TO BE SOLVED: To detect particles in a cavity. SOLUTION: A laser medium 11 installed in a laser cavity 13 is excited in the end face by an optical pumping source 19 to be started and laser beam is supplied to a laser cavity 13. In the same way, a detection region 29 formed in the laser cavity 13 can retain particles or a particle-containing fluid in the inside and exposed to the laser beam. The beam is scattered by the particles in the detection region 29 and the scattered light indicates existence of particles as fine as 0.05-10μm and by gathering scattered light, the scattered light can be used for supply an output which shows the existence of particles in the detection region 29. The laser cavity 13 is provided with the solid laser medium 11 in the inside and the laser medium is excited in the end face by a semiconductor which supplies light having a focal point on the laser medium to adjust gain aperture.
申请公布号 JPH102856(A) 申请公布日期 1998.01.06
申请号 JP19970042623 申请日期 1997.02.26
申请人 RES ELECTRO OPT INC 发明人 SANDBERG JOHN C
分类号 G01N15/00;G01N15/02;G01N15/14;G01N21/39;G01N21/53;(IPC1-7):G01N21/53 主分类号 G01N15/00
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