发明名称 WIRE BONDING DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a wire bonding device having adjustment means which enables simple and accurate adjustment of positional relation between a torch distal end portion and a wire lower end portion, in order to form a ball of a desired size. SOLUTION: A wire is inserted into a capillary tool 27 held at a distal end portion of a horn 22. A torch 54 is held by a holding unit 60. The holding unit 60 includes a first block 61, a second block 62 and a third block 63. By horizontally rotating the first block 61 with respect to a rotation axis 65 as the center, the position of a distal end portion of the torch 54 in the X-direction is adjusted. By moving the second block 62 forward and backward with respect to the first block 61, the position of the distal end portion of the torch 54 in the Y- direction is adjusted. By moving the third block 63 upward and downward with respect to the second block 62, the position of the distal end portion of the torch 54 in the Z-direction is adjusted.
申请公布号 JPH104117(A) 申请公布日期 1998.01.06
申请号 JP19960155154 申请日期 1996.06.17
申请人 MATSUSHITA ELECTRIC IND CO LTD 发明人 MUKOJIMA HITOSHI
分类号 H01L21/60 主分类号 H01L21/60
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