Förfarande och anordning för bestämning av skikttjocklekar

摘要

A method and apparatus for determining the thickness of at least one layer superimposed on a substrate, at least one of the layers or the substrate being a conductor of electricity. The method includes the steps of generating an electromagnetic alternating field in the vicinity of the outer most layer with a coil in order to cause any currents to be generated in the conductor which act upon the alternating field. The frequency of the alternating field is adjusted to at least two different frequencies and is measured at these frequencies. The thickness of the layers is then determined based on the measurements and the electromagnetic properties of the substrate and the layers.