Cooling system for semiconductor process

摘要

A cooling system for use in a UV curing apparatus is disclosed. The cooling system includes a UV curing apparatus and a water supply element connected to the UV curing apparatus for cooling the curing apparatus via a first solenoid valve. A CPU is responsive to the UV curing apparatus for controlling the status of the first solenoid valve. An inverter is connected to the CPU and its output is coupled to a second solenoid valve. The second solenoid valve connects an air purging element to the curing apparatus. The air purging element provides clean dry air to force the water out of the curing apparatus.