Sensor component produced in microstructural circuitry in form of transverse girder

摘要

The sensor component is designed so that a free arm (2) of the transverse girder carries a permanent magnetic layer (4) or is made of permanent magnetic material. The arm is deflectable by an external magnetic field, and this deflection is a measurement value of the sensor component. Preferably the free arm is connected with a holding arm approximately vertical to this to form a one piece component. The holding arm is a semiconductor substrate which also includes other components. The free arm is designed to be at right angles to the torsion arm (1).