Phasenmodulierende Mikrostrukturen für höchstintegrierte Flächenlichtmodulatoren

摘要

The invention relates to a structure for phase modulation of light (32) falling on said structure which has a mirror (40), a deformable and transparent dielectric (36) arranged on said mirror, at least two electrodes (41, 42; 41a, 41b, 42; 50, 50') which are at one or a plurality of fixed voltages, and can be acted upon by one or a plurality of control voltages, to generate an electric field (58) in at least one partial region of the dielectric (36). Consequently, the optical path length of the light traversing the dielectric (36) is changed in relation to a state of the dielectric (36) which is not acted upon by the electric field. An arrangement of a plurality of said phase modulating structures which is applied to a CMOS-active matrix, forms a highly-integrated surface light modulator.